Sensors and Actuators

Course description

Sensor definitions, transduction principles, classifications of sensors and actuators.
Essential sensor properties: characteristics, sensitivity, accuracy, resolution, selectivity, minimal detected signal, threshold, nonlinearity, repeatability, noise, temperature zero drift, overload, stability, analysis of sensor dynamic response     
Review of standard silicon microelectronic technologies: Micromachining: basic materials properties, deposition, etching, LIGA, sacrified film, laser application, opening sealing, substrate bonding, sensor chip encapsulation/packaging, 3D structures fabrication          
Analog and digital signal conditioning in sensor and actuator systems-.  
Review of sensor and actuator structures and applications: Piezoresistive, Piezoelectric, Pyroelectric, Capacitive, Resonant, Thermoelectric, Radiation, Magnetic, Chemical, Optical fiber    
Advanced sensor and actuator structures,

Course is carried out on study programme

Objectives and competences

Understanding of effects, structures, technologies and applications of sensors and actuators.
Application of obtained sensor and actuator knowledge for realization of advanced sensor and actuator systems.

Learning and teaching methods

Lectures, seminar

Intended learning outcomes

Presentation of effects, structures, technologies and applications of sensors and actuators, and their application in practical problems in advanced sensor and actuator systems.

Reference nosilca

Možek M, Vrtačnik D, Resnik D, Pečar B, Amon S (2011) Adaptive calibration and quality control of smart sensors. In: Ivanov O (ed) Applications and experiences of qulity control, Intech, Rijeka: pp 645-662    
 

Pečar B, Križaj D, Vrtačnik D, Resnik D, Dolžan T, Možek M (2014) Piezoelectric peristaltic micropump with a single actuator. Journal of micromechanics and microengineering: 24/10: 1-9
 

Dolžan T, Pečar B, Možek M, Resnik D, Vrtačnik D (2015) Self-priming bubble tolerant microcylinder pump. Sensors and actuators. A, Physical 233: 548-556    
 

Resnik D, Možek M, Pečar B, Dolžan T, Janež A, Urbančič-Rovan V, Vrtačnik D (2015) Characterization of skin penetration efficacy by Au-coated Si microneedle array electrode. Sensors and actuators. A, Physical 232: 299-309         
 

Pečar B, Vrtačnik D, Resnik D, Možek M, Dolžan T, Brajkovič R, Križaj D (2015) Micropump operation at various driving signals : numerical simulation and experimental verification. Microsystem technologies 21/7: 1379-1384     
 

Study materials

Lyshevski S (2005) Nano- and microelectromechanical systems, CRC press, Boca Raton
Fraden J (2010) Handbook of modern sensors : physics, designs, and applications, Springer, New York
Horowitz P, Hill W (2008) The art of electronics, Cambridge University Press, Cambridge        
Soloman S (2010) Sensors handbook, McGraw-Hill, New York      
Amon, Slavko (2013) Senzorji in aktuatorji, Fakulteta za elektrotehniko, Ljubljana

Bodi na tekočem

Univerza v Ljubljani, Fakulteta za elektrotehniko, Tržaška cesta 25, 1000 Ljubljana

E:  dekanat@fe.uni-lj.si T:  01 4768 411