Micro/nano technologies and structures

Subject description

Fundamentals of micro/nano technologies and structures – definitions, principles, classifications.

Basic micro/nano structures: sensors, actuators, microreactors, microfluidic chips, lab-on-chip systems, micro/nano positioners and other similar structures.

Review of micro/nano technologies: micromachining, microelectronic technologies, deposition, etching, LIGA, sacrified film, laser application, opening sealing, substrate bonding, sensor chip encapsulation/packaging, 3D structures fabrication, nanotubes etc.

Analog signal conditioning: basic circuits, operational amplifier circuits (instrumentation amplifier, summing amplifier, charge amplifier), sources (current, voltage, band gap references), filters, comparators and Schmitt trigger, analog converters (current/voltage/charge/frequency) etc.

Digital signal conditioning: basic building blocks, signal discretisation, sample&hold circuits, digital-to-analog and analog-to-digital converters etc.

Review of micro/nano structures and applications:   Sensors (Bio/Chemical sensors. Piezoresistive sensors. Piezoelectric sensors. Pyroelectric sensors. Capacitive sensors. Resonant sensors. Thermoelectric sensors. Radiation sensors. Magnetic sensors. Optical fiber sensors, etc.), Actuators (thermal, capacitive, piezoelectric etc.), Microfluidic chips, Microreactors, Lab-on-chip, Micro/Nano positioners etc.

Advanced micro/nano technologies and structures.

Simulation tools for analysis and design (SPICE simulacije, finite element method and multiphysics simulations, Monte Carlo method)

The subject is taught in programs

Objectives and competences

The aim of the course is to give participants a comprehensive overview of new approaches, principles, technologies, structures and applications in the field of micro/nano technologies and structures.

Teaching and learning methods

Basic theory and subject overview is addressed by lectures, while practical knowledge and experience are gained through laboratory work, seminars and projects.

Expected study results

Learning outcomes of the course include a comprehensive overview of basic effects, designs, realizations and applications, together with basic electronic circuits, in the field of micro/nano technologies and structures.

Basic sources and literature

  • S.Amon, SENZORJI IN AKTUATORJI 1. del: Osnove senzorike , Založba UL FE, 2013 (knjiga na spletu)
  • S.Amon, SENZORJI IN AKTUATORJI 2. del: Pregled senzorjev in aktuatorjev Založba UL FE, 2013 (knjiga na spletu)
  • S.E.Lyshevsky, Nano- and Micro- Electromechanical Systems, CRC Press, 2005.
  • J. Fraden, Handbook of Modern Sensors, AIP Press, 1997.
  • P. Horowitz, W. Hill, The Art of Electronics 3rd. ed., Cambridge University Press, 2015.
  •    E. Gusev, E. Garfunkel, A. Dideikin, Advanced Materials and Technologies for Micro Nano-Devices, Sensors and Actuators, Springer, 2010.

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