Subject description
Sensor definitions, transduction principles, classifications of sensors and actuators.
Essential sensor properties: characteristics, sensitivity, accuracy, resolution, selectivity, minimal detected signal, threshold, nonlinearity, repeatability, noise, temperature zero drift, overload, stability, analysis of sensor dynamic response
Review of standard silicon microelectronic technologies: Micromachining: basic materials properties, deposition, etching, LIGA, sacrified film, laser application, opening sealing, substrate bonding, sensor chip encapsulation/packaging, 3D structures fabrication
Analog and digital signal conditioning in sensor and actuator systems-.
Review of sensor and actuator structures and applications: Piezoresistive, Piezoelectric, Pyroelectric, Capacitive, Resonant, Thermoelectric, Radiation, Magnetic, Chemical, Optical fiber
Advanced sensor and actuator structures,
The subject is taught in programs
Objectives and competences
Understanding of effects, structures, technologies and applications of sensors and actuators.
Application of obtained sensor and actuator knowledge for realization of advanced sensor and actuator systems.
Teaching and learning methods
Lectures, seminar
Expected study results
Presentation of effects, structures, technologies and applications of sensors and actuators, and their application in practical problems in advanced sensor and actuator systems.
Basic sources and literature
Lyshevski S (2005) Nano- and microelectromechanical systems, CRC press, Boca Raton
Fraden J (2010) Handbook of modern sensors : physics, designs, and applications, Springer, New York
Horowitz P, Hill W (2008) The art of electronics, Cambridge University Press, Cambridge
Soloman S (2010) Sensors handbook, McGraw-Hill, New York
Amon, Slavko (2013) Senzorji in aktuatorji, Fakulteta za elektrotehniko, Ljubljana
Stay up to date
University of Ljubljana, Faculty of Electrical Engineering Tržaška cesta 25, 1000 Ljubljana