Sensors and Actuators

Subject description

Sensor definitions, transduction principles, classifications of sensors and actuators.
Essential sensor properties: characteristics, sensitivity, accuracy, resolution, selectivity, minimal detected signal, threshold, nonlinearity, repeatability, noise, temperature zero drift, overload, stability, analysis of sensor dynamic response     
Review of standard silicon microelectronic technologies: Micromachining: basic materials properties, deposition, etching, LIGA, sacrified film, laser application, opening sealing, substrate bonding, sensor chip encapsulation/packaging, 3D structures fabrication          
Analog and digital signal conditioning in sensor and actuator systems-.  
Review of sensor and actuator structures and applications: Piezoresistive, Piezoelectric, Pyroelectric, Capacitive, Resonant, Thermoelectric, Radiation, Magnetic, Chemical, Optical fiber    
Advanced sensor and actuator structures,

The subject is taught in programs

Objectives and competences

Understanding of effects, structures, technologies and applications of sensors and actuators.
Application of obtained sensor and actuator knowledge for realization of advanced sensor and actuator systems.

Teaching and learning methods

Lectures, seminar

Expected study results

Presentation of effects, structures, technologies and applications of sensors and actuators, and their application in practical problems in advanced sensor and actuator systems.

Basic sources and literature

Lyshevski S (2005) Nano- and microelectromechanical systems, CRC press, Boca Raton
Fraden J (2010) Handbook of modern sensors : physics, designs, and applications, Springer, New York
Horowitz P, Hill W (2008) The art of electronics, Cambridge University Press, Cambridge        
Soloman S (2010) Sensors handbook, McGraw-Hill, New York      
Amon, Slavko (2013) Senzorji in aktuatorji, Fakulteta za elektrotehniko, Ljubljana

Stay up to date

University of Ljubljana, Faculty of Electrical Engineering Tržaška cesta 25, 1000 Ljubljana

E: T:  01 4768 411