Sensors and Actuators

Sensor definitions, transduction principles, classifications of sensors and actuators.
Essential sensor properties: characteristics, sensitivity, accuracy, resolution, selectivity, minimal detected signal, threshold, nonlinearity, repeatability, noise, temperature zero drift, overload, stability, analysis of sensor dynamic response     
Review of standard silicon microelectronic technologies: Micromachining: basic materials properties, deposition, etching, LIGA, sacrified film, laser application, opening sealing, substrate bonding, sensor chip encapsulation/packaging, 3D structures fabrication          
Analog and digital signal conditioning in sensor and actuator systems-.  
Review of sensor and actuator structures and applications: Piezoresistive, Piezoelectric, Pyroelectric, Capacitive, Resonant, Thermoelectric, Radiation, Magnetic, Chemical, Optical fiber    
Advanced sensor and actuator structures,

Understanding of effects, structures, technologies and applications of sensors and actuators.
Application of obtained sensor and actuator knowledge for realization of advanced sensor and actuator systems.

Lectures, seminar